Gerhold Chemetals Co., Ltd.

TANTALUM SILICIDE

TANTALUM SILICIDE

CAS:12039-79-1
Molecular formula:Si2Ta
Molecular weight:237.12
Description:Depositing TaSi2 by sputtering and chemical vapour deposition (selective and non-selective deposition) opens a wide variety of applications for this material in very-large-scale integration technology.

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